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SOFTWALL CLEANROOM – LITHOGRAPHY

Cleanroom specifications

  • ISO class 6 (ISO 14644-part 1)
  • approx. 160 air changes per hour in the main area
  • 4 no. H14 HEPA fan filter units
  • Dimensions: approx. 9 m2 (3m x 3m) x 2.5m int. height
  • High capacity prefilter, up to 6x longer life
  • Robust powder coated mild steel frame
  • Braked swivel castors for maximum mobility (mobile)
  • Clear softwall PVC curtain strips around full perimeter
  • Bearing structure out of sight
  • Fully flush cleanroom ceiling
  • Fascia boarding around full perimeter
  • Integrated LED panels
  • Cleanroom controller with manual and automated control
  • Magnehelic pressure gauge for pressure monitoring

The project

The largest research institute in the Netherlands has a partnership with the market leader in photolithography. Together they investigate a EUV light source required for the latest generation of wafer steppers.

The modular softwall cleanroom achieves a very clean ISO Class 6 environment. In this room, a test set-up is placed that is sensitive to dust particles. The soft wall cleanroom is equipped with wheels making it portable and mobile.

The ceiling has a completely flush finish which makes cleaning the cleanroom quick and easy, as well as keeping it clean. The unique concept of the supporting structure has been completely kept out of view and behind the covering. Because of this, the space has a very presentable appearance.

The cleanroom has 4 LED panels that provide a high light output of 1000 lux; necessary for this type of research work.

Direct benefits for the user:

  • Very clean environment through high number of air changes
  • Heat load on surrounding space nil by efficient DC ECM motor technology
  • Automatic control with adjustable weekly programme
  • Delivered in a few weeks
  • Validated to the cleanroom standard ISO14644
  • Mobile for flexible use

Check out our photo gallery with pictures of completed projects.

Want to know more?

REQUEST INFORMATION

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Softwall
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PANELBLOC CLEANROOM – INTERNATIONAL MANUFACTURER IN THE SEMICONDUCTOR INDUSTRY

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PANELBLOC CLEANROOM – ROOSEN MECHATRONICA B.V.

PANELBLOC CLEANROOM – ROOSEN MECHATRONICA B.V.

MODULAR HARDWALL CLEANROOM – MACHINEFABRIEK WESTERHOF

MODULAR HARDWALL CLEANROOM – MACHINEFABRIEK WESTERHOF

PANELBLOC CLEANROOM – INTERNATIONAL MANUFACTURER OF HIGH-TECH COMPONENTS

PANELBLOC CLEANROOM – INTERNATIONAL MANUFACTURER OF HIGH-TECH COMPONENTS

MODULAR HARDWALL CLEANROOM – HITTECH BIHCA BV

MODULAR HARDWALL CLEANROOM – HITTECH BIHCA BV

PANELBLOC CLEANROOM – IAI INDUSTRIAL SYSTEMS B.V.

PANELBLOC CLEANROOM – IAI INDUSTRIAL SYSTEMS B.V.

PANELBLOC CLEANROOM – ARBÈL

PANELBLOC CLEANROOM – ARBÈL

MODULAR HARDWALL CLEANROOM – BIOREACTORS, CLEANING, ASSEMBLY AND PACKAGING

MODULAR HARDWALL CLEANROOM – BIOREACTORS, CLEANING, ASSEMBLY AND PACKAGING

MODULAR HARDWALL CLEANROOM – BRONKHORST High-Tech B.V.

MODULAR HARDWALL CLEANROOM – BRONKHORST High-Tech B.V.

PANELBLOC CLEANROOM – CLEANING, ASSEMBLY AND PACKAGING

PANELBLOC CLEANROOM – CLEANING, ASSEMBLY AND PACKAGING

PANELBLOC CLEANROOM – BKL ENGINEERING

PANELBLOC CLEANROOM – BKL ENGINEERING

SOFTWALL CLEANROOM – VDL-ETG

SOFTWALL CLEANROOM – VDL-ETG

PANELBLOC CLEANROOM – INNOVAR AND IPS

PANELBLOC CLEANROOM – INNOVAR AND IPS

PANELBLOC CLEANROOM – MACHINEFABRIEK VAN DEN ELSEN

PANELBLOC CLEANROOM – MACHINEFABRIEK VAN DEN ELSEN

HARDWALL CLEANROOM – LOA MTRC FULL SURFACE GROUP

HARDWALL CLEANROOM – LOA MTRC FULL SURFACE GROUP

HARDWALL CLEANROOM – METALNET PRECISION COMPONENTS

HARDWALL CLEANROOM – METALNET PRECISION COMPONENTS

FULLY FLUSH MONOBLOC CLEANROOM – FOR SEMICONDUCTOR AND ELECTRONICS ASSEMBLY SOLUTIONS

FULLY FLUSH MONOBLOC CLEANROOM – FOR SEMICONDUCTOR AND ELECTRONICS ASSEMBLY SOLUTIONS

HARDWALL CLEANROOM – CLEANING, ASSEMBLY AND PACKAGING CUSTOM MADE PACKAGING SOLUTIONS

HARDWALL CLEANROOM – CLEANING, ASSEMBLY AND PACKAGING CUSTOM MADE PACKAGING SOLUTIONS

FULLY FLUSH HARDWALL CLEANROOM – ASSEMBLING HI-TECH VACUUM AND PRECISION COMPONENTS

FULLY FLUSH HARDWALL CLEANROOM – ASSEMBLING HI-TECH VACUUM AND PRECISION COMPONENTS

HARDWALL CLEANROOM – CLEANING, ASSEMBLY AND PACKAGING

HARDWALL CLEANROOM – CLEANING, ASSEMBLY AND PACKAGING

CROSSFLOW UNIT – DISPLAY ASSEMBLY AND REPAIR

CROSSFLOW UNIT – DISPLAY ASSEMBLY AND REPAIR

LASER-SAFE CLEANROOM MACHINE ENCLOSURE – CUSTOM DESIGN

LASER-SAFE CLEANROOM MACHINE ENCLOSURE – CUSTOM DESIGN

MOBILE CLEANROOM – PRODUCT SAMPLING FOR HEALTHCARE

MOBILE CLEANROOM – PRODUCT SAMPLING FOR HEALTHCARE

SOFTWALL CLEANROOM – MEDICAL

SOFTWALL CLEANROOM – MEDICAL

CLEANROOM – SOLAR CELL PRODUCTION

CLEANROOM – SOLAR CELL PRODUCTION

CROSSFLOW UNIT – ‘ORGAN-ON-A-CHIP’

CROSSFLOW UNIT – ‘ORGAN-ON-A-CHIP’

SOFTWALL CLEANROOM – EUV RESEARCH

SOFTWALL CLEANROOM – EUV RESEARCH

CROSSFLOW UNIT – PHARMACEUTICAL

CROSSFLOW UNIT – PHARMACEUTICAL

DOWNFLOW CANOPY – OFFSHORE LABORATORIUM

DOWNFLOW CANOPY – OFFSHORE LABORATORIUM

CLEAN BENCH – MOBILE DEVICES

CLEAN BENCH – MOBILE DEVICES

MODULAR CLEANROOM – TECH INDUSTRY

MODULAR CLEANROOM – TECH INDUSTRY

MODULAR CLEANROOM – E-LIQUID

MODULAR CLEANROOM – E-LIQUID

DOWNFLOW CABINET – EUV TOOL

DOWNFLOW CABINET – EUV TOOL

SOFTWALL CLEANROOM – LITHOGRAPHY

SOFTWALL CLEANROOM – LITHOGRAPHY

SOFTWALL CLEANROOM – MEDICAL PACKAGING

SOFTWALL CLEANROOM – MEDICAL PACKAGING

DOWNFLOW UNIT – BIOMEDICAL AND MEDICAL DEVICES

DOWNFLOW UNIT – BIOMEDICAL AND MEDICAL DEVICES

Support response time is short. Contact is informal and very pleasant.
F.L.Syncreon Electronics
ProCleanroom have provided excellent support in selecting the best cleanroom configuration for our process. Delivery and installation as promised and good after sales support.
P. v. DoornTokyo Electron Europe
ProCleanroom proved to be a reliable partner, supplying us with a turnkey cleanroom according to specification, within our budget and within our critical schedule.
Erik H.no. 1 OEM Lithography
DOWNFLOW CABINET – EUV TOOL
SOFTWALL CLEANROOM – MEDICAL PACKAGING

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