- ISO class 6 and 7 (ISO 14644-part 1).
- 30 no. H14 type HEPA fan filter units equipped with high capacity prefilters.
- Dimensions: ca. 355 m², 2.85m int. height.
- Fully flush walls and ceiling with high performance insulation properties (sound and thermal).
- Integrated flush LED panels for optimal lighting according to a predetermined lighting plan.
- Self closing swing doors with interlock system.
- Goods transit area to support good practice procedures.
- High capacity air conditioning system for heating and cooling.
- Self-supporting construction, no need for suspension.
- Approx. 480m² of ESD floor coating suitable for a cleanroom, both inside and surrounding the area.
The PanelBloc cleanroom
This c.a. 355 m², PanelBloc cleanroom for Pfeiffer Vacuum Benelux B.V., with a ISO-clasisfication of 6 & 7 is installed on their premise in Culemborg. A global company with its roots back to 1890, Pfeiffer Vacuum+Fab Solutions delivers best-in-class solutions tailored for semiconductor, analytics, research, and various other applications.
Pfeiffer Vacuum Benelux significantly expanded its existing cleanroom facilities to meet the rigorous demands of a key client in the high-tech sector. The need for expansion was directly related to the increasing complexity and volume of work generated by this semiconductor industry leader.
Building a cleanroom for next-generation service
According to Peter Spierenburg, Service Manager Benelux at Pfeiffer Vacuum, “Working for such a client means that we must seek extra depth in execution.” The company produces a special helium leak detector designed for use on the client’s new-generation lithography machines. As the requirement for both the supply and the servicing of these highly specific leak detectors grew tremendously, Pfeiffer realized it needed dedicated, specialized capacity.
Recognizing this development in advance, the company began drafting specifications for an advanced and larger cleanroom approximately three years ago. The goal was to align the facility entirely with the client’s exacting standards. This proactive approach resulted in the construction of a completely new 355m² ISO 6/7 Cleanroom. This substantial investment ensures Pfeiffer Vacuum can provide the necessary dedicated and highly specific maintenance and support required by its critical clients in the semiconductor industry.
Fit-for-purpose layout and verified molecular cleanliness
Eighty percent of the cleanroom workspaces are operationally separated and specifically configured to achieve a Grade 2 cleanliness level. The maintenance process for helium leak detectors is highly streamlined: upon entry, they are disassembled, cleaned, serviced, and reassembled, all within the same controlled cleanroom environment.
Following maintenance, the leak detectors undergo a mandatory twenty-four-hour outgassing period before being subjected to a two-step testing procedure. The first test verifies the functional factory specifications; the second involves an RGA (Residual Gas Analysis) test, performed using a proprietary Pfeiffer Omnigrade RGA system, to verify the required Grade 2 molecular cleanliness. The specialized test systems required for this process were developed and manufactured in-house by Pfeiffer.
Evolving insights regarding the new testing tools, however, necessitated significant adjustments during the construction phase. This adaptability was crucial, as the heat load generated by these new tools was found to be higher than originally forecasted, posing a risk of exceeding the required temperature limit. Consequently, necessary modifications were implemented to ensure the environment remained temperature-controlled and fully compliant. Crucially, the cleanroom’s design also incorporated specialized utilities, strategically placed at pre-determined locations throughout the facility, to ensure all processes run optimally and to guarantee the highest degrees of cleanliness and operational safety.
Precision handling with specialized cleanroom cranes
To ensure the safe and precise handling of heavy components within the cleanroom, the facility is equipped with a dedicated lifting infrastructure. This system features two comprehensive cleanroom crane systems and one static hoisting point, totaling three lifting points, all uniformly rated for a lifting capacity of 250 kg.
This specialized infrastructure is critical for operational efficiency and contamination control. The dual crane systems provide flexible coverage across the different workspaces, enabling the accurate movement of parts from disassembly through testing. Simultaneously, the fixed hoisting point is strategically positioned for tasks requiring maximum vertical precision at a dedicated workstation.
Project management and total solution delivery
ProCleanroom delivered a full-service solution, managing the entire scope of work. From the piping to special lighting in the inspection area, no component was left unaddressed. This complete, hassle-free service covered everything from technical consultation and installation to validation, fit-out, and the supply of consumables. A critical feature of the facility is the integration of special UV-A inspection areas. Among others this ensures that any potential contamination is detected during the cleaning and packaging process, guaranteeing adherence to the client’s stringent Grade 2 cleanliness specifications.
Furnishing and Advice
The furniture and advice for choosing the right cleanroom products suitable for the work process of Pfeiffer is fully carried out by the Accessories & Consumables division of ProCleanroom. The specialists of this division, together with pfeiffer, looked at the wishes and requirements and based this on a package of products. By running this process in parallel with the construction of the cleanroom, it could immediately be furnished and put into use.
Direct benefits for the user:
- Full turnkey solution – design, hardware, installation, furniture and accessories: a single point of contact.
- Maximum cleanliness performance due to fully flush walls, floor and ceiling.
- Maximum cosmetic appearance for client and supplier presentation.
- Lowest power consumption and operating costs in the market.
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