Cleanrooms for Semiconductor

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Mikroskop Industrie Produktion Computer Wafer

Developing your expertise within the semiconductor industry often requires cleanrooms or laminar flow cabinets with a high ISO class (ISO 5 or higher). Are you dealing with UV-sensitive processes? Even then ProCleanroom supplies the right cleanroom. The cleanrooms have a high-quality wall finish and feature lighting with UV filter. By use of anti-static (ESD) materials and anti-static bars on the filter system, the static charge in the air neutralises.

When degassing is not desired, ProCleanroom offers a cleanroom of non-outgassing softwall materials (PU). This technology originates in the aerospace industry.

Mini-environments
Often used in this industry, are compact cleanroom mini-environments. These mini-environments are often placed in a cleanroom, and have a higher class than the ISO cleanroom itself, required for executing the critical process.

Typical processes in the semiconductor industry:

  • Protection of substrates and silicon wafers
  • EUV Research
  • Mask aligners
  • Vacuum coating, thin film deposition
  • Printing applications
  • Optics
  • Front-end and back-end processes

ProCleanroom: Build your expertise.

TNO
THALES
SYNCREON
PLASTICUM
PHILIPS
Patheon
NEWAYS
Molnlycke Healthcare
Philips Medisize
KONI
Koninklijke Marine
Irmato
Flextronics
ESA
ECN
ASML
Abbott

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