Developing your expertise within the semiconductor industry often requires cleanrooms or laminar flow cabinets with a high ISO class (ISO 5 or higher). Are you dealing with UV-sensitive processes? Even then ProCleanroom supplies the right cleanroom. The cleanrooms have a high-quality wall finish and feature lighting with UV filter. By use of anti-static (ESD) materials and anti-static bars on the filter system, the static charge in the air neutralises.
When degassing is not desired, ProCleanroom offers a cleanroom of non-outgassing materials (PU). This technology originates in the aerospace industry.
Typical processes in the semiconductor industry:
- Protection of substrates and silicon wafers
- EUV Research
- Mask aligners
- Vacuum coating, thin film deposition
- Printing applications
- Front-end and back-end processes
ProCleanroom: Build your expertise.