Besi Semiconductor Industries is a listed leading manufacturer of semicon equipment. ProCleanroom have already supplied several ISO-class 6 environments in recent years to Besi.
At the end of 2020 Besi raised a challenging question: ”Can ProCleanroom develop an extremely clean unidirectional (laminar flow) unit according to ISO class 3 for the installation of a semiconductor production test tool”
We accepted the challenge and successfully developed, installed and validated the high end ISO-class 3 solution as an extension to an existing ISO-class 6 modular cleanroom in Austria. Result: zero particles present down to 0.3 micron and below. Maximum success!
To achieve this extremely clean working environment the cleanroom unit is equipped with 10 no. U15 ULPA absolute filters with maximum filter efficiency, combined with an advanced controller to be able to precisely regulate each fan module. The fan modules are equipped with the latest generation of EC motors for maximum energy efficiency and minimalization of heat load and sound pressure.
The interior and exterior walls have a completely flush finish for maximum cleanliness. A special permanent surface coating is applied to the panels to allow for minimum adhesion of particles and contamination to the surface area. These walls have been combined with a quality cleanroom ceiling system to allow for the installation of the fan modules and still meet the extreme cleanliness requirements.
The cleanroom passed the validation flawlessly, resulting in a better than ISO-class 3 environment.
A great achievement by our complete team. Besi is very satisfied with the solution and the cleanroom was immediately put into use for their cirtical processes.