ISO-class 6 softwall cleanroom for Besi Austria GmbH

Besi is a leading supplier of semiconductor assembly equipment for the global semiconductor and electronics industries offering high levels of accuracy, productivity and reliability at a low cost of ownership.

For their location in Austria, we have installed an ISO Class 6 cleanroom in addition to their existing ISO Class 3 cleanroom and several ISO-class 6 environments. The 40.5 m² cleanroom consists of three sections of 13.5 m² each. One section is completely darkened with opaque (black) softwall curtains, this area is used for UV inspection of components.

The modular softwall cleanroom has an internal height of 2.4 m and by using 12 no. H14 type HEPA fan filter units equipped with high capacity prefilters, a environment with a cleanliness category of ISO class 6 in operational status can easily be achieved.

The cleanroom is equipped with a special plenum at the top into which cooled, conditioned air is blown. Thanks to this solution, it retains its modular character, but is still conditioned by the building-related system.

Softwall cleanrooms are the most economic and flexible cleanroom solutions. The walls and partitions consist of flexible PVC-strips. Depending on the application and configuration, ISO-class 5 to 9 can be achieved. As the strips overlap, they form an effective closed wall, when at rest. A positive air flow ensures process and material protection against contamination.

Softwall cleanroom specifications

Technical cleanroom specifications:

• ISO class 6 (ISO 14644-part 1)
• Dimensions: approx. 40 m2 (10 m x 4 m) x 2.4 m int. height
• 12 no. H14 HEPA fan filter units
• 12 no. Surface mounted LED bars for optimal lighting
• Additional plenum for cooled/conditioned air from the building-related air conditioning system
• Self supporting mild steel frame

Cleanroom appearance:

• Transparent softwall curtain
• Opaque (black) softwall curtain

The advantages of a modular cleanroom

Modular cleanrooms, compared to their traditionally constructed counterparts, present several technological advancements. Prefabricated components enable rapid deployment via streamlined on-site assembly, reducing lead times. Furthermore, inherent modularity facilitates seamless expansion, reconfiguration, or even relocation to cater to dynamic business needs or evolving processes. Notably, the initial capital expenditure associated with modular cleanrooms is demonstrably lower when compared to conventional construction methods. These inherent advantages culminate in maximized operational flexibility and cost-effectiveness.

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